Product Description

GIIL technology covers following high-tech sputtering web coater. It is of the same type as Von ardenne’s Fosa or Leybold’s SmartWeb. For ITO, AR coating, Solar Cell multi-layered purpose. GIIL technology covers following high-tech sputtering web coater. It is of the same type as Von ardenne’s Fosa or Leybold’s SmartWeb. For ITO, AR coating, Solar Cell multi-layered purpose. Characteristics of Web coating system. Vacuum pumping Differential pumping systems. With gate valves, Lip Seals, baffles Chamber Overall pumping : TMP or Diffusion pump with baffle for regulating pumping speed Coating zone pumping: TMPs Or separate pumping with large diffusion pump, valves. Polycold meissner coil , each located inside each zones, below sputtering cathodes, by 1 Polycold system (**0, **0 L/S) According Booster pumps and Direct-Drive Rotary pumps. Winding system • AC servo motor driving • Load-cell tension pickup -Forward-Reverse winding system. PRE-TREATMENT SYSTEM I/R heating system (Halogen Lamp, *0Kw) Pre-treatment with DC(MF) sputter or Linear Ion system Sputtering Cathodes 6 cathodes for ITO , SiO2, TiO2, Nb, Co, Ni (Dual MF, Single DC, Pulse P/S) IN-SITU MEASUREMENT SYSTEM By Ohm resistance measuring By reflective index measuring This type of sputtering machine can also equipped with evaporation source.